Hayashi Pure Chemical Ind.,Ltd.

Metal Film Etchant

Insulating Film EtchantPure Etch ZE series

 Features of the product

  • Excellent etching of insulating film without chemical damage on Al and Al alloy film
  • Forming excellent forward taper
  • Applicable to forming via and pad process by wet etching
  • Pure Etch ZE series as pretreatment of Pure Etch 160 (Al damageless Si etchant) possible

Catalog information

Catalog of Functional Chemicals is available.
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