Hayashi Pure Chemical Ind.,Ltd.

Metal Film Etchant

Stacked Film EtchantPure Etch AS series (For Stacked Film )

 Features of the product

  • Excellent etching of triple stacked film as Mo/Al/Mo and Mo alloy/Al alloy/Mo alloy in one process
  • Forming excellent forward taper
  • Small side etching and fine pattern forming
  • Excellent uniformity of etching rate and etching profile

Catalog information

Catalog of Functional Chemicals is available.
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